Axcelis Technologies Corporate Profile
Corporate Overview

Replay
Q3 2009 Axcelis Technologies, Inc. Earnings Conference Call
November 5, 2009, 5:00 PM ET

We are a leading producer of ion implantation equipment used in the fabrication of semiconductors and, together with our Japanese joint venture SEN, we have led this market in eight of the last ten years, according to Gartner Dataquest. The ion implantation process provides a means for introducing charged ions into the surface of a silicon wafer in order to form the active components of a semiconductor chip. We also produce Cleaning (dry strip), Curing (photostabilization) and rapid thermal processing equipment, which are all used in semiconductor manufacturing primarily before and after the ion implantation process. In addition, we provide extensive aftermarket service and support, including spare parts, equipment upgrades, maintenance services and customer training.

We are a 50-50 joint venture partner in Japan with Sumitomo Heavy Industries, Ltd., or SHI. This joint venture, which is known as SEN Corporation, an SHI and Axcelis Company, licenses our technology and is the leading producer of ion implantation equipment in Japan.

Our customers are located in North America, Europe, and Asia Pacific. We and SEN serve all of the 20 largest semiconductor manufacturers in the world. We believe that more than 4,000 of our products, including products shipped by SEN, are in use worldwide. We manufacture our equipment at one central location in the United States, and we support customers through 38 field offices in eleven countries. SEN manufactures equipment at its Saijo, Japan facility.

Transfer Agent
Shareholder Relations – 781-575-2725
Website – www.computershare.com
Email – shareholder@computershare.com

Address for shareholder inquiry/correspondence:

Computershare
P.O. Box 43069
Providence, RI 02940-3069

Or for overnite delivery:

Computershare
250 Royall Street
Canton, MA 02021
Independent Accountants
Ernst & Young, LLP
200 Clarendon Street
Boston, MA 02116
Phone (617) 266-2000
Fax (617) 266-5843
Investor Relations Contact
Heather Carberry
Phone 978-787-4000
investor.relations@axcelis.com

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